This course introduces the basic properties of thin films, and the science and technology of thin film deposition, processing and characterization. The morphology, texture, mechanical, electronic and optic properties of thin films will be covered. Important thin film deposition techniques, such as physical vapor deposition, chemical vapor deposition and atomic layer deposition as well as their applications in the electronics and solar cell industry will be described. Topics closely related to film growth and their properties, including vacuum technology, gas kinetics and plasma discharge, will also be briefly touched. Common thin-film characterization methods which measure film composition and structure as well as mechanical, electrical and optic properties will also be covered. This course is for master and senior students major in physics, materials science and microelectronics with an interest in pursuing a career in materials science research, technological development and industrial production.