"Basic knowledge in materials science and engineering, physics, and chemistry is required. This course will give the students a brief introduction about the micro and nanofabrication technologies, including structure definition technologies such as UV-lithograhpy some nanolithography technologies, structure transfer technologies such as wet chemical etching and dry etching, and some special technologies for the fabrication of nanostructures. Especially, material behaviors and properties will be discussed in those nanofabrication processes. "